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Bosch: The King of MEMS Sensors

2009-10-10    

Since 1995, Bosch has manufactured one billion MEMS sensors (micro-electro-mechanical systems or MEMS). The annual production volume has increased to more than 200 million sensors – more than half a million units per working day. This makes Bosch the uncontested number one in the global market for MEMS sensors.


Sensors are the electronic sensory organs which perceive the surrounding conditions. MEMS sensors include mechanical functional elements such as springs, beams, weights, or membranes in the form of fine silicon structures just thousandths of a millimeter thick. They are used to measure physical variables such as pressure, acceleration, yaw-rate, flow quantity, or gas composition accurately and reliably. Bosch has many years of experience in the development and manufacture of micro-mechanical sensors. Since the middle of the 1980’s, Bosch researchers have developed the fundamental manufacturing technologies needed for volume and surface micro-mechanics, thus paving the way for the mass production of MEMS sensors.